Real-time TEM imaging of the formation of crystalline nanoscale gaps.
نویسندگان
چکیده
We present real-time transmission electron microscopy of nanogap formation by feedback controlled electromigration that reveals a remarkable degree of crystalline order. Crystal facets appear during feedback controlled electromigration indicating a layer-by-layer, highly reproducible electromigration process avoiding thermal runaway and melting. These measurements provide insight into the electromigration induced failure mechanism in sub-20 nm size interconnects, indicating that the current density at failure increases as the width decreases to approximately 1 nm.
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عنوان ژورنال:
- Physical review letters
دوره 100 5 شماره
صفحات -
تاریخ انتشار 2008